Focused ion beam implantation as a tool for the fabrication of nano electromechanical devices 

    Llobet Sixto, Jordi (Date of defense: 2016-03-18)

    La tesi doctoral titulada “Focused ion beam implantation as a tool for the fabrication of nano electromechanical devices” aborda el repte de la fabricació de ressonadors nano-mètrics des d’una nova òptica basada en la ...