2024-03-29T06:38:48Zhttps://www.tdx.cat/oai/requestoai:www.tdx.cat:10803/4562362017-11-13T08:20:24Zcom_10803_120col_10803_163
http://hdl.handle.net/10803/456236/ore.xml
2017-11-13T07:20:34Z
2017-11-13T07:20:34Z
TDX (Tesis Doctorals en Xarxa)
Advanced nanoscale characterization concepts for copper interconnection technologies
Berthold, Tobias
2017-11-13T07:20:34Z
ORIGINAL
CC-LICENSE
CC-LICENSE
CC-LICENSE
MEDIA_DOCUMENT