2024-03-29T06:36:12Zhttps://www.tdx.cat/oai/requestoai:www.tdx.cat:10803/423002017-09-23T23:18:42Zcom_10803_120col_10803_163
00925njm 22002777a 4500
dc
Placidi, Marcel
author
2010-07-28
Vegeu mpresum1de1.pdf
9788469464335
http://hdl.handle.net/10803/42300
B-37363-2011
Semiconductor
MEMS
Resonator
Wide Bandgap Semiconductors for MEMS and Related Process Technologies